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Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography
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Authors: D. O. Filatov (University of Nizhny Novgorod, Nizhny Novgorod, Russia) 
Book Description:
This book presents and discusses a promising technology for fabrication of the one- and two-dimensional nanoperiodic structures on the solid surfaces by direct two- and four-beam standing wave pulsed laser modification. This method being developed extensively at present is very promising for application in nanoelectronics, data storage, integrated optics, and is considered to be a promising alternative to X-ray lithography in a wide range of applications.

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Table of Contents:
Preface
Chapter 1. Introduction, pp. 1-6

Chapter 2. Standing Wave Pulsed Laser Modification of the Solid Surfaces: Apparatus and Basics, pp. 7-25

Chapter 3. Forming the One- and Two- Dimensional Periodic Relief on the Fused Silica and Si Surfaces by Standing Wave-Pulsed Laser Lithography, pp. 27-42

Chapter 4. The Two-Dimensional Periodic Patterning of the Solid Surfaces by Direct Four-Beam Standing Wave Excimer Laser Modification, pp. 43-57

Chapter 5. Self-Assembling of the Periodic Arrays of the Nanometer-Sized Semiconductor Islands Stimulated by Standing Wave UV Laser Radiation, pp. 59-68

Chapter 6. Conclusion, pp. 69-71

References, pp. 73-79

Index

   Series:
      Lasers and Electro-Optics Research and Technology
   Binding: Softcover
   Pub. Date: 2010
   Pages: 6 x 9
   ISBN: 978-1-61668-674-1
   Status: AV
  
Status Code Description
AN Announcing
FM Formatting
PP Page Proofs
FP Final Production
EP Editorial Production
PR At Prepress
AP At Press
AV Available
  
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Two-Dimensional Periodic Nanoscale Patterning of Solid Surfaces by Four-Beam Standing Wave Excimer Laser Lithography