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Amorphous Silicon Carbide Thin Films: Deposition, Characterization, Etching and Piezoresistive Sensors Applications
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Authors: Mariana Amorim Fraga (Technological Institute of Aeronautics, Brazil) 
Book Description:
Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterization and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications. (Imprint: Novinka)

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Table of Contents:
Preface

Acknowledgments

1. Introduction, pp. 1-2

2. An overview on silicon carbide (SiC), pp. 3-23

3. Description of experimental procedures: deposition, characterization and etching, pp. 25-31

4. Analysis de experimental results, pp. 33-68

5. An overview on SiC piezoresistive sensors, pp. 69-89

6. Final remarks, pp. 91-92

References

Index

   Series:
      Materials Science and Technologies
   Binding: Softcover
   Pub. Date: 2011 - 4th Quarter
   Pages: 6 x 9 (NBC - C)
   ISBN: 978-1-61324-774-7
   Status: AV
  
Status Code Description
AN Announcing
FM Formatting
PP Page Proofs
FP Final Production
EP Editorial Production
PR At Prepress
AP At Press
AV Available
  
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Amorphous Silicon Carbide Thin Films: Deposition, Characterization, Etching and Piezoresistive Sensors Applications