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Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications
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$189.00
Editors: Britt Ekwall and Mikkel Cronquist
Book Description:
So-called top-down technologies have enabled us to manufacture and fabricate structures even smaller than the micrometer scale. MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems in the late 1980s. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. By using top-down technology such as MEMS, material costs and the amount of waste can be reduced, thus having a potential to meet the requirements to improve global health. This book also examines a 4-step process for analyzing medication adherence data generated by MEMS and similar electronic monitoring devises. Example analyses are presented to demonstrate these methods using MEMS data HIV-positive subjects' adherence to antiretroviral medications. Other chapters in this book examine power MEMS, defined as microsystems for power generation and energy conversion, including propulsion and cooling, novel optical MEMS device that can fully characterize the transparent living cells or microparticles in real time, an adaptive sliding mode controller for a MEMS vibratory z-axis gyroscope, and the use of nanofretting in nano/microelectromechanical systems (NEMS/MEMS).

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Chapter 1 - A Systematic Approach for Analyzing Electronically Monitored Adherence Data pp. 1-66
Authors / Editors: (G. J. Knafl, K. L. Delucchi, C. A. Bova, K. P. Fennie, K. Ding, A. B. Williams, University of North Carolina at Chapel Hill, Chapel Hill, NC, USA, and others)
***Open Access Chapter. Free Download Available***

Chapter 2 - Design for Reliability of Micromechatronic Structural Systems pp. 67-126
Authors / Editors: (Eugenio G. M. Brusa, Politecnico Di Torino, Dipartimento di Meccanica (Dept. of Mechanics), Laboratory of Microsystems Design and Testing)

Chapter 3 - Power MEMS: An Important Category of MEMS pp. 127-164
Authors / Editors: (Siaw Kiang Chou, Kaili Zhang, Wenming Yang, Jun Li, Zhiwang Li, Department of Mechanical Engineering, National University of Singapore, Singapore, and others)

Chapter 4 - Structure and Stability of Silicon Clusters Stabilized by Hydrogen at High Temperatures pp. 165-194
Authors / Editors: (Alexander Y. Galashev, Institute of Industrial Ecology, Ural Division, Russian Academy of Sciences, Yekaterinburg, Russia)

Chapter 5 - Design of Optical MEMS for Transparent Biological Cell Characterization pp. 195-223
Authors / Editors: (Xiaodong Zhou, Kai Yu Liu, Nan Zhang, Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), Singapore, and others)

Chapter 6 - Nanomotors Actuated by Phonon Current pp. 225-239
Authors / Editors: (Bing-Yang Cao, Quan-Wen Hou, Zeng-Yuan Guo, Department of Engineering Mechanics, Tsinghua University, Beijing, China)

Chapter 7 - Tangential Nanofretting and Radial Nanofretting pp. 241-258
Authors / Editors: (Linmao Qian, Jiaxin Yu, Bingjun Yu, Zhongrong Zhou, Tribology Research Institute, National Traction Power Laboratory, Southwest Jiaotong University, Chengdu, China)

Chapter 8 - Adaptive Poisson Modeling of Medication Adherence among HIV-Positive Methadone Patients Provided Greater Understanding of Behavior pp. 259-273
Authors / Editors: (Kevin Delucchi, George Knafl, Nancy Haug, James Sorensen, University of California, San Francisco, CA, USA, and others)
***Open Access Chapter. Free Download Available***

Chapter 9 - Robust Adaptive Control for MEMS Vibratory Gyroscope pp. 275-291
Authors / Editors: (J. Fei, Department of Mechanical Engineering, University of Akron, Akron, OH, USA)

Chapter 10 - The Electric Force on the Moving Electrode of an Inclined Plate Capacitor pp. 293-310
Authors / Editors: (Yumin Xiang, Department of Physics, Sichuan University of Science and Engineering, Sichuan, China)

Chapter 11 - Portable Diagnostic Technologies for Resource Poor Environments pp. 311-315
Authors / Editors: (Hideyuki F. Arata, Curie Institute, Paris, France)

Chapter 12 - Ballistic Transport through Quantum Wires and Rings pp. 317-373
Authors / Editors: (Vassilios Vargiamidis, Vassilios Fessatidis, Department of Physics, Aristotle University, Thessaloniki, Greece, and others)

Chapter 13 - Lattice Boltzmann Model as an Innovative Method for Microfluidics pp. 375-381
Authors / Editors: (Lajos Szalmas, Department of Mechanical and Industrial Engineering, University of Thessaly, Volos, Greece)

   Series:
      Nanotechnology Science and Technology
   Binding: Hardcover
   Pub. Date: 2011 - 1st Quarter
   Pages: 7 x 10 391pp.
   ISBN: 978-1-60876-474-7
   Status: AV
  
Status Code Description
AN Announcing
FM Formatting
PP Page Proofs
FP Final Production
EP Editorial Production
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Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications