Technology of Low Temperature Co-Fired Ceramic (LTCC)-Based Microfluidic Systems (pp. 379-400)
Authors: (Karol Malecha, Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland)
Abstract: In this chapter, the challenges and issues involved in manufacturing process of fluidic structures in multilayer LTCC (Low Temperature Co-fired Ceramics) substrate are described. Subsequently, an short overview is provided of methods for micromachining of the structures on the ”green” ceramic tapes. Different techniques of the lamination of LTCC ceramic tapes and methods of fluidic channel fabrication using sacrificial volume materials (SVM) and hot embossing are discussed. Moreover, LTCC to various materials bonding techniques are described. Exemplary LTCC-based microfluidic structures (micromixer, flow sensor, electrochemical and optical sensor) are described.