Generation of Micropatterns on Side Surfaces of Polymer and Si Substrates Using a Micropunching Lithography Approach ) pp. 97-117
Authors: (Cheng Luo, Department of Mechanical and Aerospace Engineering, University of Texas, Arlington, Texas
Abstract: A macropunching method has been applied in the manufacturing industry to create macropatterns in a sheet metal (i.e., a metal plate) for over a hundred years. Motivated by this approach, we have developed a micropunching lithography (MPL) method to produce microstructures of various materials. Like the macropunching approach, the MPL also includes “cutting” and “drawing” operations. They are applied to generate microstructures on top and side surfaces of substrates, respectively. This chapter gives a simple review of the “drawing” operation and reports the results that we have achieved to date, including the fabrication of Au and polydimethylsiloxane (PDMS) micropatterns on the sidewalls of Si and high density polyethylene (HDPE) substrates, and the application of the PDMS micropatterns to build super-hydrophobic channels.